Comments or suggestions about the glossary? Please email Chris Mack.
I have written a very thorough glossary of semiconductor lithography-related words (over 300 entries). This glossary is inlcuded as an appendix in my lithography textbook, Fundamental Principles of Optical Lithography. An on-line version of this glossary is hosted and maintained by KLA-Tencor:
On-line Glossary of Lithography Terms
Comments or suggestions about the glossary? Please email Chris Mack.