I've been teaching a graduate-level course called Semiconductor Lithography at the University of Texas at Austin for the last 16 years. This textbook grew out of my lecture notes for that class. The material below may be helpful to others who might wish to teach a similar course.
Here is the syllabus that I use when I teach: Syllabus.pdf
Here is an example course flyer: Litho_course_flyer.pdf
Here are some additional "bonus" homework problems: Bonus_Homework.pdf (last updated 11-28-2007)
In addition, a complete solutions manual for all homework problems is available from the publisher (for instructors only).
Feel free to contact me with any questions about teaching out of this book: chris@lithoguru.com.