Lithography, Microlithography, Photolithography, Nanolithography

Lithography - A method of producing three-dimensional relief patterns on a substrate (from the Greek lithos, meaning stone, and graphia, meaning to write).

Microlithography - Lithography involving the printing of very small features, typically on the order of micrometers or below in size.

Photolithography - Lithography involving the use of light to image and expose patterns into a photoresist (also called optical lithography).

Nanolithography - Lithography at the scale of tens of nanometers.


Litho Textbook: Fundamental Principles of Optical Lithography

Chris Mack's lithography publications

Chris Mack's lithography essays


Some good links to microlithography information:

Training Courses in Lithography by Chris Mack

Chris Mack's Basics of Microlithography Processing

Chris Mack's Glossary of Lithography Terms

History of Microlithography - an ongoing project

Wikipedia - general lithography

Wikipedia - photolithography

PROLITH - Lithography Simulation

PROLITH and the Cartoon Version of Me

The Personal Side of Microlithography

Diaries of a Lithography Conference Attendee


Here are links to some of my "lithography friends":

Grant Willson, UT Austin, Photoresist Research

Bruce Smith, RIT

Petersen Advanced Lithography

Mike Watts, Nanoimprint Consultant