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In the past 35+ years I have attended many, many lithography conferences. Since beginning this web site in 2006, I have started keeping a diary of my experiences at many of these conferences (with both technical and personal insights from these events). Here are those diaries.
Diary of a Conference Attendee, SPIE Microlithography Symposium 2006
Diary of an Advanced Lithographer, SPIE Advanced Lithography Symposium 2007
Diary of an Advanced Lithographer 2, SPIE Advanced Lithography Symposium 2008
Diary of an Advanced Lithographer 3, SPIE Advanced Lithography Symposium 2009
Diary of an Advanced Lithographer 4, SPIE Advanced Lithography Symposium 2010
Diary of an Advanced Lithographer 5, SPIE Advanced Lithography Symposium 2011
Diary of an Advanced Lithographer 6, SPIE Advanced Lithography Symposium 2012
Diary of an Advanced Lithographer 7, SPIE Advanced Lithography Symposium 2013
Diary of an Advanced Lithographer 8, SPIE Advanced Lithography Symposium 2014
Diary of an Advanced Lithographer 9, SPIE Advanced Lithography Symposium 2015
Diary of an Advanced Lithographer 10, SPIE Advanced Lithography Symposium 2016
Diary of an Advanced Lithographer 11, SPIE Advanced Lithography Symposium 2017
Diary of an Advanced Lithographer 12, SPIE Advanced Lithography Symposium 2018
Diary of an Advanced Lithographer 13, SPIE Advanced Lithography Symposium 2019
Diary of an Advanced Lithographer 14, SPIE Advanced Lithography Symposium 2020
(Sorry - no diary for the online 2021 Advanced Lithography Symposium)
Diary of an Advanced Lithographer 15, SPIE Advanced Lithography and Patterning Symposium 2022
Diary of an Advanced Lithographer 16, SPIE Advanced Lithography and Patterning Symposium 2023
Diary of an Advanced Lithographer 17, SPIE Advanced Lithography and Patterning Symposium 2024
Diary of an Advanced Lithographer 18, SPIE Advanced Lithography and Patterning Symposium 2025
An American Lithographer in Japan, Photomask Japan 2007
Far-out: Attending the 3-Beams Conference, EIPBN 2008
Aloha From the EUV Islands, EUV Workshop 2008
Tropical Lithography, EUV Workshop 2009
Making Masks in Monterey, BACUS 2009
Lithography in Prague, EUV and Immersion Symposiums 2009
Lithography in Las Vegas, EIPBN, the 3-Beams Conference 2011
Semicon West Lithography Report, Semicon West 2012
Nano in New Zealand, AMN-6, the Advanced Materials and Nanotechnology Conference 2013
Immersed in the Desert, Lithography Workshop 2013
Semicon Again, Semicon West 2016
Captive in Orlando, EIPBN, the 3-Beams Conference 2017
Photopolymers in Japan, International Conference of Photopolymer Science and Technology 2017
Live From Monterey, Photomask Technology Conference + EUVL Symposium 2017
Lithography in the Land of Fortified Wine, MNE, Micro and Nanoengineering 2017
Three Beams in Puerto Rico, EIPBN, the 3-Beams Conference 2018
Live Again From Monterey, Photomask Technology Conference + EUVL Symposium 2019
Lithography on a Greek Island, MNE, Micro and Nanoengineering 2019
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