Publications in the field of semiconductor lithography

Chris Mack has published several books and book chapters, writes several magazine columns, and has over 170 technical papers in the field of lithography:

Textbook: Fundamental Principles of Optical Lithography

Books and Others

Technical papers (a complete list)

Chris's Favorites (downloadable)

Chris's Recent Papers (downloadable)

Chris's Papers on LER (downloadable)

Essays on Lithography

The Lithography Tutor (downloadable)

Editor-in-Chief, JM3

How to Write a Good Scientific Paper