A history of microlithography is yet to be written. I am collecting some data for such an effort, and am anxious for help by people with personal experience.
Here is a presentation (PDF) outlining milestones in the development of photolithography tools, organized by company. It's actually more of a tool company history. (Updated on 8-29-2011)
Milestones in Optical Lithography Tool Suppliers
Atsuhiko Kato has developed a great timeline of lithography tool developments as well:
Kato's Timeline of Lithography Tool Development
Here are some good published papers on the topic of semiconductor lithography history (available in PDF format by clicking on the titles):
(Thanks to SPIE, Grant Willson, John Bruning, and Tomoyuki Matsuyama for allowing me to post these papers here.)
Some essay's I've written on lithography related to history and trends: Essays
If you have any anecdotes or histories of lithography development in the semiconductor industry that you'd like to share, please email me at email@example.com.