Chris's Favorite Review Papers on Lithography

The papers listed below are available in PDF format by clicking on the titles.

  1. C. A. Mack, “Trends in Optical Lithography,” Optics and Photonics News (April, 1996) pp. 29-33.
  2. C. A. Mack, “Lithographic simulation: a review,” Lithographic and Micromachining Techniques for Optical Component Fabrication, Proc., SPIE Vol. 4440 (2001) pp. 59-72.
  3. C. A. Mack, “The End of the Semiconductor Industry as We Know It,” Optical Microlithography XVI, Plenary Address, (2003) pp. xxi - xxxi.
  4. C. A. Mack, “The New, New Limits of Optical Lithography,” Emerging Lithographic Technologies VIII, Proc., SPIE Vol. 5374 (2004), pp. 1-8.
  5. C. A. Mack, “Thirty Years of Lithography Simulation,” Optical Microlithography XVII, Proc., SPIE Vol. 5754 (2005), pp. 1-12.
  6. Chris A. Mack, “Fifty Years of Moore’s Law”, IEEE Transactions On Semiconductor Manufacturing, Vol. 24, No. 2 (May, 2011) pp. 202-207.

 

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