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Glossary of Lithography Terms

I have written a very thorough glossary of semiconductor lithography-related words (over 300 entries). This glossary is inlcuded as an appendix in my lithography textbook, Fundamental Principles of Optical Lithography. An on-line version of this glossary is found here.


“When I use a word, it means just what I choose it to mean – neither more nor less.”
Humpty Dumpty (Lewis Carroll’s Alice’s Adventures in Wonderland)


The following is a list of common words or phrases and their corresponding definitions as used in the field of semiconductor microlithography. For a field as rich and diverse as lithography, no list of terms could ever be complete. I hope, however, that the terms contained here are sufficiently representative that this glossary might be useful as a reference. In particular, people new to or outside of the field of lithography should benefit from its use. The definitions assume the reader has a general technical background and a basic familiarity with the semiconductor industry.


Format of Glossary Entries:


Glossary Item Definition of the glossary item, in the context of semiconductor microlithography, is given here.

Example: An example sentence that illustrates the use of the glossary item appears here.


The example sentence is meant to illustrate the use of the glossary item in the context of lithography, but is not a part of the definition of the item.


For further glossary terms related to lithography, consult:

SEMI Standards M1-94, P5-94, P18-92, P19-92, P21-92, and P25-94.

Chris Mack, Gentleman Scientist